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Radiation Damage of Semiconductor Device by X-ray
J. Radiat. Prot. Res. 2015;40(2):110 DOI: https://doi.org/10.14407/jrp.2015.40.2.110
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Development of accurate dose evaluation technique of X-ray inspection for quality assurance of semiconductor with Monte Carlo simulation
Hyojun Park, Hyun Joon Choi, Keunho Rhew, Heonsang Lim, Hyunyoung Lee, Iloh Jang, Chul Hee Min
Applied Radiation and Isotopes.2019; 154: 108851. CrossRef
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