| Home | E-Submission | Sitemap | Contact Us |  
top_img
J. Radiat. Prot. Res > Volume 40(2); 2015 > Article
Journal of Radiation Protection and Research 2015;40(2):110-0.
doi: https://doi.org/10.14407/jrp.2015.40.2.110
엑스선에 의한 반도체 소자의 방사선 손상
김동성;홍현승;박혜민;김정호;주관식;
Radiation Damage of Semiconductor Device by X-ray
Kim, D.S.;Hong, H.S.;Park, H.M.;Kim, J.H.;Joo, K.S.;
ABSTRACT
Recently, Due to the increased industry using radiation inspection equipment in the semiconductor, this demand of technology research is increasing. Although semiconductor inspection equipment is using low energy X-ray from 40 keV to 120 keV, Studies of radiation damage about the low energy X-ray are lacking circumstance in our country. Therefore, It is study that BJT (bipolar junction transistor) of one type of semiconductor elements are received radiation damage by low energy X-ray. BJT were used to the NXP semiconductor company's BC817-25 (NPN type), and Used the X-ray generator for the irradiation. Radiation damage of BJT was evaluated that confirm to analyse change of collector-emitter voltage of before and after X-ray irradiation when current gain fixed to 10. X-ray generator of tube voltage was setting 40 kVp, 60 kVp, 80 kVp, 100 kVp, 120 kVp and irradiation time was setting 180s, 360s, 540s into 180s intervals. As the result, We confirmed radiation damage in BJT by low energy X-ray under 120 keV energy, and Especially the biggest radiation damage was appeared at the 80 kVp. It is expected that ELDRS (enhanced low dose rate sensitivity) phenomenon occurs on the basis of 80 kVp. This studies expect to contribute effective dose administration of semiconductor inspection equipment using low energy X-ray, Also Research and Development of X-ray filter.
TOOLS
PDF Links  PDF Links
Full text via DOI  Full text via DOI
Download Citation  Download Citation
Share:      
METRICS
1
Crossref
0
 
4,500
View
352
Download
Radiation Management of Kori Nuclear Power Plant #I   ;1(1)
Editorial Office
#319, Hanyang Institute of Technology Bldg., 222 Wangsimni-ro, Seongdong-gu,Seoul, Republic of Korea
Tel: +82-2-2297-9775   Fax: +82-2-2297-9776
Email: managing.editor@jrpr.org
About |  Browse Articles |  Current Issue |  For Authors and Reviewers
Copyright © by Korean Association for Radiation Protection. Developed in M2PI